Micromachined Arrayed Dip Pen Nanolithography Probes

نویسندگان

  • David Bullen
  • Xuefeng Wang
  • Jun Zou
  • Seunghun Hong
  • Sung-Wook Chung
  • Kee Ryu
  • Zhifang Fan
  • Chad Mirkin
  • Chang Liu
چکیده

We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing active probe designs with respect to a number of performance criteria are also demonstrated.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

MEMS Arrayed Scanning Probes for Soft Nanolithography

In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and mult...

متن کامل

Ink Diffusion in Dip - Pen Nanolithography : A Study in the Development of Nano Fountain Probes

The intention of this research was to investigate the ink diffusion that takes place in dip-pen nanolithography in order to better understand how to enhance the possibilities of nano fountain probes. Varying concentrations of 16-mercaptohexadecanoic acid in ethanol were used as ink in dip-pen nanolithography, and the relationships between contact time, concentration, and ink diffusion were stud...

متن کامل

Parallel dip-pen nanolithography with arrays of individually addressable cantilevers

In dip-pen nanolithography ~DPN!, nanoscale chemical patterns are created by directly transferring chemical molecules from the tip of an atomic force microscope probe to a surface. We report the development of a thermally actuated probe array for DPN applications. The array consists of ten thermal bimorph actuated probes, each 300 mm long, with a lateral spacing of 100 mm. The probes are actuat...

متن کامل

Development of Parallel Dip Pen Nanolithography Probe Arrays for High Throughput Nanolithography

Dip Pen Nanolithography (DPN) is a lithographic technique that allows direct deposition of chemicals, metals, biological macromolecules, and other molecular “inks” with nanometer dimensions and precision. This paper addresses recent developments in the design and demonstration of high-density multiprobe DPN arrays. High-density arrays increase the process throughput over individual atomic force...

متن کامل

Multifunctional probe array for nano patterning and imaging.

This letter reports the design, fabrication, and testing of a multifunctional scanning probe array for nanoscale imaging and patterning. The probe array consists of multiple cantilever probes, with each probe being able to perform a dedicated function such as scanning probe lithography (e.g., dip pen nanolithography and scanning probe contact printing) or scanning probe microscopy (e.g., atomic...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2002